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Engineering
Service Group

Continuous operation
reliability guaranteed.

semiconductor CO2 cleaning

TECHNOLOGY

Based on the know-how accumulated over many years in the field of precision dry cleaning,
we possess leading technology and provide quick answers to cleaning problems encountered in the field.

semiconductor equipment cleaning
  • semiconductor equipment cleaning
    High standard quality control based on
    functional/performance tests

    Cleaning quality control through
    conducting various tests for flow velocity, humidity,
    vibrational power, noise, and cleaning power

  • semiconductor equipment cleaning
    Technical support
    to ensure efficiency

    ESG's technical experts provide consulting
    and support for more efficient cleaning by analyzing
    and reviewing pressure, temperature, flow rate, adhesion strength
    of foreign substances, and degree of aging hardening.

  • semiconductor CO2 cleaning
    International patents
    and certifications
    • Korea’s only CO2 particle cleaning (international patent)
    • Technology patent on deburring device and method
    • Technology patent on CO2 particle control device for precision dry cleaning
    • ISO 9001:2015, venture, Innobiz, CE, certification as a specialized company for materials and equipment, etc.